Похоже, они делают из по 65 нм техпроцессу. -> --> http://blog.atmel.com/2015/02/23/simply-the-highest-performing-cortex-m-mcu/ http://www.ineltek.com/atmel-unleashes-highest-performing-arm-cortex-m7-based-mcus-with-superior-memory-architecture-and-connectivity-for-automotive-iot-and-industrial-markets-2/