CADiLO (15.12.2017 16:19, просмотров: 105) ответил Evgeny_CD на Кварц резонатор или генератор + УЗ отмывка = плохо. А как насчет MEMS генератора + УЗ отмывка? Есть ли опыт?
Как то так... The ultrasonic cleaning process transfers energy at the cleaning frequency to the MEMS structure. This energy causes vibration of the movable masses within the MEMS structure at the ultrasonic cleaning frequency. Special attention shall be paid to not transfer energy with a cleaning frequency close to the resonant frequencies of these movable masses within the MEMS structure.